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Phenom ProX

Desktop SEM with integrated EDS elemental analysis

The Thermo Scientific Phenom ProX G6 is a sixth generation desktop SEM that fills the gap between light microscopy and floor-model SEM analysis. In addition to fast, high-resolution imaging, it has an integrated EDS (Energy-Dispersive X-ray diffraction) detector for fast, easy elemental analysis.

The Phenom ProX can relieve the burden of routine analysis from floor-model SEM instruments. It’s fast and easy to use, with quick instrument configuration and simple sample loading mechanism for a quick turnaround time.

  • Users of all experience levels can quickly begin producing high quality results.
  • Long-life CeB6 source for high brightness and low maintenance.
  • Compact system with no specialist infrastructure requirements.

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Thermo Phenom ProX


  • Process control
  • Quality control
  • Material science
  • Semiconductors
  • Failure analysis


  • Handle common samples to relieve the workload of floorstanding SEMs.
  • Fully integrated EDS detector for elemental analysis.
  • Easy for users of all experience levels.
  • Fast, high-resolution imaging.
  • No specialist infrastructure required.

EDS Element Identification 

The Phenom ProX G6 has a fully integrated EDS detector for identifying elements without switching to a separate system. The SEM column is designed so high-resolution imaging is performed at the same working distance as EDS analysis, so there’s no time wasted on reconfiguration between the two techniques.

Live EDS provides immediate element identification with point and click in imaging mode. More advanced analysis, including the optional EDS line scans and fast mapping, are performed via an integrated EID (Element IDentification) application.

Almost all materials in the periodic table can be identified, starting from Boron (5) and up to Californium (98). 

Thermo EDS Analysis

Secondary Electron Detector (Optional)

The standard detector in the Phenom ProX is a four-segment backscattered electron detector (BSD) for sharp images and topographical contrast information.

There’s also the option of adding a secondary electron detector (SED). This collects low-energy electrons from the top surface layer, for detailed surface information. This is useful for applications where topography and morphology are important, for example when examining microstructures, nanostructures or particles.

The Phenom ProX performs live mixing of backscattered and secondary electron images to combine compositional and topographic data.

Long-Life Electron Source

The CeB6 (cerium-hexaboride) source has multiple benefits; Firstly, its high brightness compared to tungsten makes it easier to obtain high quality, detailed images. In addition to this, it has a very long lifetime. Maintenance can be scheduled, for maximum productivity. To extend the lifetime, the source hibernated when the system isn’t in use. When the time comes and the source needs to be replaced, the procedure can be performed on-site.

Size and Weight

  • Imaging module
    Size: 286mm (w) x 566mm (d) x 495mm (h) 
    Weight: 50 kg
  • Diaphragm vacuum pump
    Size: 145mm (w) x 220mm (d) x 213mm (h) 
    Weight: 4.5 kg
  • Power supply
    Size: 156mm (w) x 300mm (d) x 74mm (h)
    Weight: 3 kg
  • 24″ Monitor
    Size: 531.5mm (w) x 250mm (d) x 515.4mm (h)
    Weight: 6.7 kg
  • Workstation
    Size: 92.5mm (w) x 305.6mm (d) x 343.5mm (h)
    Weight: 8 kg


Thermo Scientific’s webinar explains how the Phenom ProX is versatile and easy to use, enabling you to do more research, and how it can be used by everyone in your team to achieve high quality results.

Register on Thermo Scientific’s site to watch on-demand…



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